DOPS - Danish Optical Society

• DOPS Award
• DOPS Directory
• Executive Board
• Service Pricelist (28 KB)
• DOPS Logo
• Financial Support
• Mailinglist

• Why become a member?
• Apply for membership
• Change address

• The Newsletter
• Recent Issues
• Former Journal Archive
• Advertising

• News Archive
• Calendar
• Jobs
• History
• Previous Events

• Members of DOPS
• Foreign societies
• Other links


	Search in: News Archive DOPS Directory

Fri 03-03-2006	Optical Diffraction Microscopy (ODM)
	A year ago LuKa OptoScope and the Danish Institute of Fundemental Metrology entered a stratitical partnership for promoting the ODM technology.

In September 2005 they presented an innovative method Optical Diffraction Microscopy (ODM) for the simultaneous measurement of specular and non-specular diffraction patterns of sub-micron periodic structures.

Read the article about ODM in Proc. SPIE, Vol. 5965; Critical dimension metrology using Optical Diffraction Microscopy

Mon 29-05-2023