Optical Diffraction Microscopy (ODM)


Fri 03-03-2006
Optical
A year ago LuKa OptoScope and the Danish Institute of Fundemental Metrology entered a stratitical partnership for promoting the ODM technology.



In September 2005 they presented an innovative method Optical Diffraction Microscopy (ODM) for the simultaneous measurement of specular and non-specular diffraction patterns of sub-micron periodic structures.

Read the article about ODM in Proc. SPIE, Vol. 5965; Critical dimension metrology using Optical Diffraction Microscopy